To enhance a detection accuracy of surface defects, even when an object to be measured is a long material, having a curve whose both ends are low or high in cross-sectional shape.
A linear light extending in a wide direction of the object to be measured is irradiated on the object to be measured. The light reflected from the object to be measured is imaged by a TDI camera 30. Furthermore, an optical cutting image is acquired. In the surface defect detection inspection of the object to be measured, shape imaging which expresses the surface shape of the object to be measured is performed from the striped images which are acquired, by arranging in order the optical cutting images. After this procedure, a preliminary processing part 101 extracts a concavo-convex part on a shape image. Furthermore, a shape correction processing part 508 carries out fitting procedure so as to obtain a fitting curve for the shape image which concavo-convex part extracted by the preliminary processing part 101 from the shape image is removed, and performs a differential operation between the fitting curve and the shape image. A defect detection processing part 509 detects the surface defect of the object to be measured, based on the data obtained from the differential operation at the shape correction processing part 508.
KONNO YUSUKE
AIMOTO YOSHINORI
SATO TAKUYA
| JPH09281055A | 1997-10-31 | |||
| JPH09280818A | 1997-10-31 | |||
| JPH11351842A | 1999-12-24 | |||
| JPH11257937A | 1999-09-24 | |||
| JP2004117053A | 2004-04-15 | |||
| JP2004003930A | 2004-01-08 | |||
| JPH0792100A | 1995-04-07 | |||
| JP2004226347A | 2004-08-12 | |||
| JPH09281055A | 1997-10-31 | |||
| JPH09280818A | 1997-10-31 | |||
| JPH11351842A | 1999-12-24 | |||
| JPH11257937A | 1999-09-24 |
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