Title:
Surface emitting laser and atomic oscillator
Document Type and Number:
Japanese Patent JP6323651
Kind Code:
B2
Abstract:
A vertical cavity surface emitting laser (100) includes: a substrate (10); a laminated body which is provided over the substrate; an electrode (82) of which at least a portion is provided over the laminated body; and a wire-bonded pad (84) which is electrically connected to the electrode, wherein the laminated body includes a first mirror layer (20) provided over the substrate, an active layer (30) provided over the first mirror layer, and a second mirror layer (40) provided over the active layer, in a plan view, the laminated body (2) includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated in the active layer, and in the plan view, the pad (84) is provided in a position that is not overlapped with at least one of the first distortion imparting portion and the second distortion imparting portion. The non-circular shape of the mesa (2) and lateral oxidation of the mirror layers with high Al content (60,62) being part of the mesa (2) together with the non-circular shape of the resin layer results in a stress induced preferred polarisation of the VCSEL emission.
Inventors:
Takenaka Satoshi
Kurashi Yuji
Kurashi Yuji
Application Number:
JP2013263468A
Publication Date:
May 16, 2018
Filing Date:
December 20, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01S5/183; H03L7/26
Domestic Patent References:
| JP2005252240A | ||||
| JP2010212385A | ||||
| JP2013093439A | ||||
| JP2012023179A | ||||
| JP2013138176A | ||||
| JP2005142361A |
Foreign References:
| EP1104056A1 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi