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Title:
SURFACE FLAW DETECTION DEVICE
Document Type and Number:
Japanese Patent JPH05296956
Kind Code:
A
Abstract:

PURPOSE: To provide a surface flaw detection device which is capable of inspecting non-metallic materials, as well as metals, as targets for surface flaw detection, permits easy surface flaw detection of a narrow region or a remote point, permits surface defect to be recorded by an image, etc., and further permits detailed inspection of a part of the sample.

CONSTITUTION: The device includes a heating device 21 for heating the surface of a material 1 to be inspected with laser beam 26, an infrared rays detection device 22 for detecting infrared rays 29 which are radiated from the material 1 to be inspected by heating, and a surface defect detection device 23 for detecting surface defect from a signal which is obtained by the infrared rays detection device 22.


Inventors:
OCHIAI MAKOTO
SATO MICHIO
Application Number:
JP10703592A
Publication Date:
November 12, 1993
Filing Date:
April 24, 1992
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G01B11/30; G01N21/88; G01N25/72; (IPC1-7): G01N25/72; G01B11/30; G01N21/88
Attorney, Agent or Firm:
Hisano Hatano (1 person outside)