PURPOSE: To provide a surface flaw detection device which is capable of inspecting non-metallic materials, as well as metals, as targets for surface flaw detection, permits easy surface flaw detection of a narrow region or a remote point, permits surface defect to be recorded by an image, etc., and further permits detailed inspection of a part of the sample.
CONSTITUTION: The device includes a heating device 21 for heating the surface of a material 1 to be inspected with laser beam 26, an infrared rays detection device 22 for detecting infrared rays 29 which are radiated from the material 1 to be inspected by heating, and a surface defect detection device 23 for detecting surface defect from a signal which is obtained by the infrared rays detection device 22.
SATO MICHIO