Title:
SURFACE FORM MEASURING TRACER
Document Type and Number:
Japanese Patent JP2628523
Kind Code:
B2
Abstract:
PURPOSE: To provide a tracer that reduces the frictional loss of a part sliding according to the movement of a feeler as well as to prevent any displacement in a certain direction from being affected to that in the other direction, in this surface form measuring tracer which measures a surface form by means of displacement of the feeler traveling along the form of a measured work surface.
CONSTITUTION: A feeler 24 is supported via an X slider 22, a Y slider 20 and a Z slider 18 free of movement in the orthogonal direction each to a base 16. Pressurized air is fed to a sliding part in space between this base 1 6 and three these sliders and an air bearing is constituted there, whereby it composes such a structure as being much less in friction. In addition, there are provided three sensors, an X sensor 68, a Y sensor and an X sensor 76 detecting each relative displacement between this base 16 and the Z slider 18, the slider 18 and the Y slider and the Y slider 20 and the X slider 22, respectively. An amount of displacement in the feeler 24 is found out by these three sensors.
Inventors:
Morio Hideo
Kenji Abiko
Tetsuo Nakamura
Kenji Abiko
Tetsuo Nakamura
Application Number:
JP12199492A
Publication Date:
July 09, 1997
Filing Date:
May 14, 1992
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
B23Q35/26; G01B7/012; G01B7/016; G01B7/28; G01B21/00; G01B21/20; (IPC1-7): G01B21/20
Domestic Patent References:
| JP5888612A | ||||
| JP58173403A | ||||
| JP56168101A | ||||
| JP5890116A |
Attorney, Agent or Firm:
Kenji Yoshida
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