To obtain the subject surface inspecting device capable of inspecting an article to be inspected with high accuracy by using a dark visual field method and capable of being reduced in size and weight.
The surface inspecting device 1 for a transparent substrate inspects the article W to be inspected on the transparent substrate 2 and is equipped with an illumination means 10 for illuminating the transparent substrate 2 with almost parallel light, the reflecting mirror 3 arranged at the position reflecting the light emitted from the illumination means 10 to be transmitted through the transparent substrate 3, a light converging means 20 for separating the light reflected from the reflecting mirror 3 into direct reflected light L1 and scattered light L2 and determining the reflecting directions of both lights, and an imaging means 30 arranged at the position missing the direct reflected light L1 and taking in the scattered light L2 to take the image of the transparent substrate 2.
Next Patent: APPARATUS FOR OPTICALLY MEASURING