To provide a surface inspection apparatus, and an inspection method for accurately inspecting a surface state of an object to be inspected by using a very simple configuration.
The invention is related to the surface inspection apparatus, and the inspection method. The surface inspection apparatus includes: a light projector (94) for contacting an inspection unit in the object to be inspected (F), and projecting an inspection light (L); first light receivers (96a, 96b) for receiving the inspection light (L) transmitted through the inspection unit; a second light receiver (100) for receiving the inspection light (L) scattered by the inspection unit; a position adjustment mechanism (54) for adjusting a position to which the inspection light (L) is projected relative to the inspection unit in accordance with the light quantity of the inspection light (L) received by the first light receivers (96a, 96b); and a decision unit (130) for determining the surface state of the inspection unit in accordance with the light quantity of the inspection light (L) received by the second light receiver (100).
Toshiyuki Miyadera
Naoki Kashima
Yasuo Takubo
Shuji Ouchi
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