Title:
SURFACE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP3256383
Kind Code:
B2
Abstract:
PURPOSE: To ensure that defects differing in the property of scattering light are detected simultaneously at low cost.
CONSTITUTION: An optical-path adjustment lens 13 consists of a cylindrical lens extending in the direction of scanning and is placed on the optical path 25a of an inspecting beam and between an inspecting portion 17a and a light receiver 12. A hollow light-transmitting portion 13a is formed at the center of the optical path adjustment lens 13. The width W1 of the light transmitting portion 13a satisfies an equation: W1 = W2 (L1/L2) in which L1 is the distance from the inspecting portion 17a to the optical path adjustment lens 13, L2 is the distance from the inspecting portion 17a to the light receiver 12, and W2 is the width of the light receiving window 12b of the light receiver 12. The lens plane 13b of the optical path adjustment lens 13 is so formed to have a convex plane of incidence facing a film 17 and have a flat emitting surface facing the light receiver 12, so that it refracts the incident beam in a direction approximately parallel to the optical axis 25a of the inspecting beam and converges the beam at the light receiving lens 12a of the light receiver 12.
Inventors:
Masahiko Yamada
Application Number:
JP22779394A
Publication Date:
February 12, 2002
Filing Date:
September 22, 1994
Export Citation:
Assignee:
Fuji Photo Film Co., Ltd.
International Classes:
G01B11/30; G01N21/89; G01N21/892; (IPC1-7): G01N21/892; G01B11/30
Domestic Patent References:
| JP5793240A | ||||
| JP6207910A | ||||
| JP61269011A | ||||
| JP466943A | ||||
| JP498149A |
Attorney, Agent or Firm:
Kazunori Kobayashi
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