To obtain a picture without defective part in an optical microscope provided in a surface inspection device for measuring or inspecting the surface of a sample by using a substantial probe.

The surface inspection device (a scanning type probe microscope 1) is provided with optical microscopes 11 to 13 for obtaining the optical picture of a sample 3, and it shows both optical pictures picked up by the optical microscope and measurement pictures obtained through measurement by a substantial probe, and further the microscopes 11 to 13 are provided with a picture processing circuit 12 which fetches picture data of a plurality of optical pictures including defective parts and performs data compensation of a picture in the defective part by using the obtained picture data. The circuit 12 uses the picture data of a plurality of optical pictures including the defective parts of the microscopes 11 to 13, and performs data compensation of the picture data in the defective parts by the picture data obtained from the other optical pictures, so that a picture of microscope including no defective part can be obtained. Thus, an optical picture at the measuring point of the surface inspection device can be observed and the measured picture and optical picture be also observed through comparison.