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Title:
SURFACE LIGHT EMITTING LASER, LASER ARRAY, SOLID-STATE LASER, INFORMATION ACQUISITION DEVICE, IMAGE FORMING APPARATUS, AND MANUFACTURING METHOD OF LASER ARRAY
Document Type and Number:
Japanese Patent JP2017017172
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a VCSEL that reduces an increase in laser threshold and stabilizes output.SOLUTION: A surface light emitting laser comprises: a p-type first semiconductor layer 105 that is arranged on an active layer 104; a second semiconductor layer 106 that is arranged on the first semiconductor layer 105 and includes an opening 130; and a p-type third semiconductor layer 107 that is arranged on the second semiconductor layer 106 and the first semiconductor layer 105 located in the opening 130 to fill a difference in step formed by the opening 130. The first semiconductor layer 105 includes hydrogen; the first semiconductor layer 105 has a hydrogen density distribution in which the density of hydrogen of a portion corresponding to the opening 130 is lower than the density of hydrogen of a portion outside the portion corresponding to the opening 130.SELECTED DRAWING: Figure 1

Inventors:
KAWASHIMA TAKESHI
Application Number:
JP2015132195A
Publication Date:
January 19, 2017
Filing Date:
June 30, 2015
Export Citation:
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Assignee:
CANON KK
International Classes:
H01S5/183; A61B5/145; B41J2/47; H01S3/00; H01S3/0941; H01S5/343; H01S5/42
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa