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Title:
SURFACE-MAGNETISM DETECTING DEVICE
Document Type and Number:
Japanese Patent JPH05196704
Kind Code:
A
Abstract:

PURPOSE: To detect the information of magnetic property with high resolution and high sensitivity by constituting a ferromagnetic needle having the pointed tip of a magnetic material and high saturated magnetization property and a magnetic material having high holding force so that the interfaces of one or more layers are in contact.

CONSTITUTION: A ferromagnetic probe 7 having the pointed tip is provided at one end of a cantilever 3. The probe 7 is obtained by machining the tip of a soft magnetic material 8 such as iron, cobalt and nickel having the diameter of 100-50μm by an electrolytic polishing method and a mechanical polishing method. A high coercive force film 10 comprising CoCrTa having the thickness of about 50nm is formed on the surface by a sputtering method. Thus, the large residual magnetization property and the high holding force are provided in the probe 7 in this way. The soft magnetic material 8 and the high holding- force film 10 are alternately attached to the surface of the probe 7 by a vapor deposition method, a sputtering method and the like, and the same effect can be obtained. In this way, the probe 7, which can measure the magnetic information of the magnetic sample with high resolution and high sensitivity, is obtained.


Inventors:
HONDA YUKIO
HOSAKA SUMIO
Application Number:
JP18858491A
Publication Date:
August 06, 1993
Filing Date:
July 29, 1991
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G01R33/02; G01N37/00; G01Q60/10; G01Q60/56; G01R33/038; G01R33/12; (IPC1-7): G01R33/02; G01R33/038; G01R33/12
Attorney, Agent or Firm:
Ogawa Katsuo