Title:
SURFACE POLISHING DEVICE AND SURFACE POLISHING METHOD
Document Type and Number:
Japanese Patent JP2003311603
Kind Code:
A
Abstract:
To provide a surface polishing device capable of controlling the surface shape of a workpiece.
The surface polishing device has surface plates 30 and 40 for pressing the workpiece 10 held by a carrier, and a pressure controlling means 50 for reducing pressure applied to the workpiece 10 by a singular point S of an end of the surface plate 30 within a predetermined period just before the finishing of the polishing.
Inventors:
FUKUDA MASAO
YAMAMOTO TOMOAKI
MOHD NOR AZMI BIN MOHD ROTSUI
YAMAMOTO TOMOAKI
MOHD NOR AZMI BIN MOHD ROTSUI
Application Number:
JP2002126891A
Publication Date:
November 05, 2003
Filing Date:
April 26, 2002
Export Citation:
Assignee:
WACKER NSCE CORP
International Classes:
B24B37/005; B24B37/08; H01L21/304; (IPC1-7): B24B37/00; B24B37/04; H01L21/304
Attorney, Agent or Firm:
Mikio Hatta (4 outside)