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Patent Searching and Data


Title:
SURFACE POTENTIAL MEASURING METHOD AND APPARATUS AND RECORDING MEDIUM
Document Type and Number:
Japanese Patent JP2001343412
Kind Code:
A
Abstract:

To provide a surface potential measuring method, a surface potential measuring apparatus and a recording medium which enable measuring of surface potential at a minute part of a sample, with higher sensitivity and accuracy.

The surface potential measuring apparatus 10 irradiates a probe 14 by a laser light from a laser light source 32, while vibrating the probe 14 sideways. A PC 28 detects the state of vibration of the probe 14, at a measuring frequency predetermined from a signal detected by a photodiode 44. The PC 28 measures the surface potential of the sample 36 from the state of vibration. The PC 28 also alters the measuring frequency according to the range of the measuring potential.


Inventors:
YONEYAMA HIROTO
YAMAZAKI KAZUO
Application Number:
JP2000167701A
Publication Date:
December 14, 2001
Filing Date:
June 05, 2000
Export Citation:
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Assignee:
FUJI XEROX CO LTD
International Classes:
G01R29/12; G03G21/00; (IPC1-7): G01R29/12; G03G21/00
Attorney, Agent or Firm:
Atsushi Nakajima (3 outside)