Title:
表面形状測定装置、表面形状測定方法、構造物製造システム、構造物製造方法、及び表面形状測定プログラム
Document Type and Number:
Japanese Patent JP7120247
Kind Code:
B2
Abstract:
[Problem] To further simplify the configuration of a surface-shape measuring device. [Solution] A surface-shape measuring device 100 (device) that measures the surface shape of an object to be measured W is provided with: a θZ stage 14 (stage) that is rotatable about a Z axis (first axis) while supporting the object to be measured W; an optical unit 20 (measuring unit) that is disposed so as to face the θZ stage 14, that is rotatable about an X axis (second axis) orthogonal to the Z axis, and that detects the distance to a measurement point P on the object to be measured W and/or the inclination of the surface of the object to be measured W at the measurement point P; and a control unit 50 (controlling unit) that rotates the θZ stage 14 about the Z axis and rotates the optical unit 20 about the X axis on the basis of reference shape data of the object to be measured W, obtained in advance, such that a reference axis S of the optical unit 20 makes a predetermined angle with the tangential plane of a reference shape of the object to be measured W at the measurement point P.
Inventors:
Takashi Miyawaki
Application Number:
JP2019546735A
Publication Date:
August 17, 2022
Filing Date:
October 02, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B21/20; B23Q17/20; B23Q17/24; G01B11/24
Domestic Patent References:
| JP7248213A | ||||
| JP2012002548A |
Foreign References:
| WO2016031935A1 | ||||
| WO2017038903A1 |
Attorney, Agent or Firm:
Kazuya Nishi