Title:
SURFACE PROFILE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3965088
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a surface profile measuring device with high measuring precision which realized size reduction, weight reduction and cost reduction.
SOLUTION: The surface profile measuring device 1 comprises a measuring head 120, a slit light projector 121 for distance measurement and an imaging part 124, and measures the contour of a measured body 150 by a light section method. It is also provided with a slit light projector 127 for marker detection and photographs at an imaging part 124, a marker image 134 based on recurrence reflection when the slit light 132 to be emitted is projected to a marker 152 pasted on the measured body 150 surface. The marker image 134 is extracted to obtain the position of the marker 152. In other words, photographing can be done only with a single imaging part 124 and so size reduction, weight reduction and cost reduction of the measuring head 120 is realized. Also, as imaging can be done only with a single imaging part 124, correlation of positions between the topology of the measured body 150 and the marker 152 can be precisely done.
Inventors:
Horiguchi Chiyoharu
Tetsuo Amano
Tetsuo Amano
Application Number:
JP2002203139A
Publication Date:
August 22, 2007
Filing Date:
July 11, 2002
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G01B11/00; G01B11/24; (IPC1-7): G01B11/24; G01B11/00
Domestic Patent References:
| JP9072713A | ||||
| JP420660A | ||||
| JP200141723A | ||||
| JP61283805A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki
Tatsuya Shioda
Shiro Terasaki
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