Title:
自己較正機能を備える表面特性解析用システム
Document Type and Number:
Japanese Patent JP5248722
Kind Code:
B2
Inventors:
One, humming
Maxton, Patrick M.
Johnson, Kenneth C.
Niko Nahad, Meredad
Maxton, Patrick M.
Johnson, Kenneth C.
Niko Nahad, Meredad
Application Number:
JP2000614020A
Publication Date:
July 31, 2013
Filing Date:
April 21, 2000
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
G01B11/00; G01N21/21; G01B11/06; G01B11/26; G01J3/02; G01J3/447; G01J4/04; G01N21/27; G01N21/41
Foreign References:
| WO1998039633A1 | ||||
| US5581350 |
Attorney, Agent or Firm:
Toshi Inoguchi
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