Title:
自己較正機能を備える表面特性解析用システム
Document Type and Number:
Japanese Patent JP5368507
Kind Code:
B2
Inventors:
One, humming
Maxton, Patrick M.
Johnson, Kenneth C.
Niko Nahad, Meredad
Maxton, Patrick M.
Johnson, Kenneth C.
Niko Nahad, Meredad
Application Number:
JP2011104901A
Publication Date:
December 18, 2013
Filing Date:
May 10, 2011
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
G01B11/00; G01N21/21; G01B11/06; G01B11/26; G01J3/02; G01J3/447; G01J4/04; G01N21/27; G01N21/41
Domestic Patent References:
| JP7151674A | ||||
| JP63012943A |
Foreign References:
| WO1998039633A1 | ||||
| US5581350 | ||||
| US5608526 | ||||
| US4306809 |
Other References:
CHEN L-Y,“Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer”,APPLIED OPTICS,US OPTICAL SOCIETY OF AMERICA,米国,1994年 3月 1日,Vol.33, No.7,p.1299-1305
AZZAM E M A,“A SIMPLE FOURIER PHOTOPOLARIMETER WITH ROTATING POLARIZER AND ANALYZER FOR MEASURING JONES AND MUE,OPTICS COMMUNICATIONS,1978年,Vol.25, No.2,p.137-140
STRAAIJER A,“THE INFLUENCE OF CELL WINDOW IMPERFECTIONS ON THE CALIBRATION AND MEASURED DATA OF TWO TYPES OF RO,SURFACE SCIENCE,1980年,Vol.96,p.217-231
COLLINS R W,REVIEW OF SCIENTIFIC INSTRUMENTS US AMERICAN INSTITUTE OF PHYSICS,米国,1990年 8月 1日,V61 N8,P2029-2026
AZZAM E M A,“A SIMPLE FOURIER PHOTOPOLARIMETER WITH ROTATING POLARIZER AND ANALYZER FOR MEASURING JONES AND MUE,OPTICS COMMUNICATIONS,1978年,Vol.25, No.2,p.137-140
STRAAIJER A,“THE INFLUENCE OF CELL WINDOW IMPERFECTIONS ON THE CALIBRATION AND MEASURED DATA OF TWO TYPES OF RO,SURFACE SCIENCE,1980年,Vol.96,p.217-231
COLLINS R W,REVIEW OF SCIENTIFIC INSTRUMENTS US AMERICAN INSTITUTE OF PHYSICS,米国,1990年 8月 1日,V61 N8,P2029-2026
Attorney, Agent or Firm:
Toshi Inoguchi