PURPOSE: To decide a defective, etc., with high accuracy by deciding the surface property of a body to be inspected by using both information obtained by a photodetection part and information on an inspected surface detected by a TV camera together, and displaying the decided property on a display unit.
CONSTITUTION: The laser beam from a laser oscillator 1 is made incident slantingly on the inspected surface of the body 11 to be inspected through a collimator lens 2, an oscillatory mirror 3, and a parabolic cylindrical mirror 4 to make a sequential scan. Then the TV camera 5 picks up the reflected image of the laser scanning light and an image processing part 6 detects the reflection position of the laser light. Then the processing part 6 finds the height H from a reference surface and then a stage 16 where the body 11 to be inspected is mounted is moved up and down by a slider 17 equipped with a driving motor 18 according to the detection output to hold the height of the inspected surface constant. Then information on the inspected surface obtained through the image processing of the processing part 6 is sent to a data processing part 9 and used to decide the kind of a flaw or defect, and decision results are displayed graphically on the display unit 10 while classified by colors.
SUMIMOTO TETSUHIRO
IMAIDE MASAAKI
MIYAUCHI HIDEKAZU
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