Title:
表面性状測定機、その制御装置およびその調整方法
Document Type and Number:
Japanese Patent JP5875900
Kind Code:
B2
Abstract:
A surface texture measurement device capable of resolving errors for each entire display range, a controller for the surface texture measurement device, and a method for controlling the surface texture measurement device that includes selecting any one of the display ranges as a reference range and defining a calibration measurement value for each display range; sequentially inputting the calibration measurement values in place of the measurement values to the range amplifier corresponding to the reference range to obtain a reference display value rDATAi; inputting the calibration measurement values to the range amplifiers corresponding to each display range, then obtaining an AD-converted value ADi and a display value DATAi; computing a gain error rate ki = rDATAi / DATAi, a display resolution DIVi = DATAi / ADi, and a corrected display resolution cDIVi = DIVi × ki; and displaying the corrected display value cDIVi = DIVi × ki.
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Inventors:
Toshihiro Kanamatsu
Hiroomi Honda
Hiroomi Honda
Application Number:
JP2012051976A
Publication Date:
March 02, 2016
Filing Date:
March 08, 2012
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B5/00; G01D18/00
Domestic Patent References:
| JP2001317971A | ||||
| JP3053111A | ||||
| JP2000310529A | ||||
| JP5034145A | ||||
| JP2000310527A | ||||
| JP56066915A | ||||
| JP61260124A |
Attorney, Agent or Firm:
Intellectual Property Office