Title:
SURFACE SHAPE MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH0255908
Kind Code:
A
Abstract:
PURPOSE:To closely set a scanning hologram and an image-formation hologram without receiving the effect of the physical interference of a lens by forming the scanning hologram for orientating light to an object to be measured and the image-formation hologram for orientating reflected light to a photodetector part on the same substrate. CONSTITUTION:Incident light from light emission part is orientated to the surface 58 of the object to be measured 56 by the scanning hologram 52 and the light reflected on the surface 58 of the object to be measured 56 is orientated to the photodetector part by the image-formation hologram 54. In the photodetector part, the shape of the surface 58 of the object to be measured 56 is measured based on the reflected light. The title device is constituted of the scanning hologram 52 and the image-formation hologram 54 formed on the same substrate 50 without using a scanning lens and an image-formation lens and both holograms 52 and 54 can be closely set, and moreover the holograms 52 and 54 can be set by overlapping a part of the holograms 52 and 54.
Inventors:
ANDO MAMORU
IWATA SATOSHI
OKA KOJI
IWATA SATOSHI
OKA KOJI
Application Number:
JP20675188A
Publication Date:
February 26, 1990
Filing Date:
August 20, 1988
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G01B11/24; G02B26/10; (IPC1-7): G01B11/24; G02B26/10
Attorney, Agent or Firm:
Teiichi Ijiba (2 outside)
Next Patent: JPH0255909