Title:
表面処理装置
Document Type and Number:
Japanese Patent JP4472962
Kind Code:
B2
Inventors:
Akiyoshi Tsuchiya
Tomohiro Mikami
Tomohiro Mikami
Application Number:
JP2003345077A
Publication Date:
June 02, 2010
Filing Date:
October 02, 2003
Export Citation:
Assignee:
Hirano light sound
International Classes:
C23C14/56; C23C26/00; C23C30/00
Domestic Patent References:
| JP6057415A | ||||
| JP9075816A | ||||
| JP6111320A | ||||
| JP47029465A |
Attorney, Agent or Firm:
Tamako Tsutada
Masato Tsuda
Masato Tsuda