Title:
表面処理装置
Document Type and Number:
Japanese Patent JP4554117
Kind Code:
B2
Inventors:
Yuki Kamura
Yasumi Sago
Yasumi Sago
Application Number:
JP2001213113A
Publication Date:
September 29, 2010
Filing Date:
July 13, 2001
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01L21/3065; H05H1/46; C23C16/509; H01L21/205; H01L21/302
Domestic Patent References:
| JP8213365A | ||||
| JP6280027A | ||||
| JP7006998A | ||||
| JP2000323463A | ||||
| JP2000331995A |
Attorney, Agent or Firm:
Kenho Ikeda