Title:
SUSCEPTOR AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP3746935
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a susceptor capable of surely electrifying an internal electrode built in the susceptor itself.
SOLUTION: Fixation holes 16 and 16 are perforated in a supporting board 13, and then power-feeding terminals 14 and 14 made of one of an electrically conductive alumina-tantalum carbide compound sintered compact, an electroconductive alumina-tungsten compound sintered compact and an electroconductive alumina-silicon carbide compound sintered compact are fixed in such a way as to pierce the board 13. After that, a coating material made of one of electroconductive composite materials selected from the group consisting of an electroconductive alumina-tantalum carbide composite material, an electroconductive alumina-tungsten composite material and an electroconductive alumina-silicon carbide composite material is applied to the surface of the board 13 in such a way as to contact with the terminals 14, followed by drying the coating material. Then, the board 13 and a mounting board 11 are stacked through the coated surface and are heat-treated under pressurization to be integrated and also to form an internal electrode 12 made of an electroconductive compound sintered compact corresponding to the above electroconductive composite material.
Inventors:
Takeshi Otsuka
Tsuyoshi Kawase
Tsuyoshi Kawase
Application Number:
JP2000103665A
Publication Date:
February 22, 2006
Filing Date:
April 05, 2000
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
C04B35/00; C04B35/10; C04B35/56; C23C16/458; (IPC1-7): C04B35/10; C23C16/458
Domestic Patent References:
| JP11214488A | ||||
| JP9283607A | ||||
| JP59078973A | ||||
| JP54101812A | ||||
| JP60127260A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama