Title:
SUSCEPTOR FOR MOLECULAR BEAM EPITAXY DEVICE
Document Type and Number:
Japanese Patent JPH01103983
Kind Code:
A
Abstract:
PURPOSE:To facilitate the delivery of a susceptor, to reduce accidents during the delivery and to shorten the time required to deliver the susceptor by cutting a groove in the side face of the susceptor. CONSTITUTION:A groove 7a is cut in the side face of a susceptor 1 for fitting a wafer. The tips of at least three support rods 8 arranged on the receiving side of a device have a shape corresponding to the shape of the groove 7a and the susceptor 1 is fixed from the side face by inserting the tips of the rods 8 in the groove 7a. Accordingly, even when a shift in the relation between the susceptor 1 and the central axis of one of the rods 8 is caused by some factor, the susceptor 1 is held at the normal position by the three rods 8.
Inventors:
TAKAHASHI KUNIHIRO
KANBARA HIDEAKI
SHIRAKI YASUHIRO
YAMAGUCHI SUMIO
TAMURA NAOYUKI
KANBARA HIDEAKI
SHIRAKI YASUHIRO
YAMAGUCHI SUMIO
TAMURA NAOYUKI
Application Number:
JP23245888A
Publication Date:
April 21, 1989
Filing Date:
September 19, 1988
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C30B23/08; H01L21/203; H01L21/68; H01L21/683; (IPC1-7): C30B23/08; H01L21/203; H01L21/68
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)
Previous Patent: PRODUCTION OF SINGLE CRYSTAL OF GROUP III-V COMPOUND SEMICONDUCTOR
Next Patent: METHOD FOR REFINING COMPOUND SEMICONDUCTOR CRYSTAL
Next Patent: METHOD FOR REFINING COMPOUND SEMICONDUCTOR CRYSTAL