Title:
SUSPENSION DEVICE FOR MICROMACHINE STRUCTURE AND MICROMACHINE/ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP3654603
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a suspension device and an acceleration sensor in which the temperature dependability of a measurement signal can be reduced for enhancing accuracy.
SOLUTION: In a suspension device in which a micromachine is fixed to a base plate 1 through at least two fixing members 7, at least one lever member 6 is provided, and one side of the lever member 6 is fixed to one side of the fixing member 7. The other side of the lever member 6 forms a first working point 16, and a micromachine structure is fixed to the first working point; on the other hand, a compensating beam 8 is provided, and the compensating beam 8 acts on a second working point 15 of the lever member, so that the deflection of the lever member 6 can be enabled by the tension of the compensating beam 8.
Inventors:
Coult Weipren
Michael Offenberg
Bernhard Elsner
Michael Offenberg
Bernhard Elsner
Application Number:
JP22371495A
Publication Date:
June 02, 2005
Filing Date:
August 31, 1995
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
B81B3/00; B81C1/00; G01P1/00; G01P15/125; H01L49/00; (IPC1-7): B81B3/00; G01P15/125; H01L49/00
Domestic Patent References:
| JP8015308A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Reinhard Einsel
Toshiomi Yamazaki
Reinhard Einsel
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