Title:
スイッチ装置および試験装置
Document Type and Number:
Japanese Patent JP4874419
Kind Code:
B1
Abstract:
To restrict a bowing amount of a piezoelectric actuator, provided is a switching apparatus comprising a contact point section including a first contact point; and an actuator that moves a second contact point to contact or move away from the first contact point. The actuator includes a first piezoelectric film that expands and contracts according to a drive voltage to change a bowing amount of the actuator, and a second piezoelectric film that is provided in parallel with the first piezoelectric film and restricts bowing of the actuator when the drive voltage is not being supplied to the first piezoelectric film.
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Inventors:
Hisao Hori
Yoshikazu Abe
Yoshihiro Sato
Yoshikazu Abe
Yoshihiro Sato
Application Number:
JP2010269964A
Publication Date:
February 15, 2012
Filing Date:
December 03, 2010
Export Citation:
Assignee:
Advantest Corporation
International Classes:
H01L41/09; G01R31/28; H01H49/00; H01H57/00; H01L41/18; H01L41/22; H01L41/43
Domestic Patent References:
| JPS5478994A | 1979-06-23 | |||
| JPS6048259A | 1985-03-15 | |||
| JPS62200779A | 1987-09-04 | |||
| JPH07229953A | 1995-08-29 | |||
| JPH05133997A | 1993-05-28 | |||
| JP2007273799A | 2007-10-18 | |||
| JP2008238330A | 2008-10-09 | |||
| JPH04184985A | 1992-07-01 | |||
| JP2006159356A | 2006-06-22 | |||
| JPH03128681A | 1991-05-31 |
Foreign References:
| WO2007083769A1 | 2007-07-26 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation