To provide an inexpensive switch without necessity of another mounting package.
Two sheets of substrates 9, 10 at least at one of which an outside electrode is installed are mutually stuck to form a cavity part in the interior. In this cavity part, a first electrode part 19 which is supported and suspended in the cavity part in both-end support shape and a second electrode 24 which is opposedly arranged with a fixed spacing at the first electrode part 19 are installed via: a driving part 16 in which a lower part electrode layer 20, a piezoelectric layer 21, and an upper part electrode layer 22 are sequentially formed; and an elastic body part 17 consisting of at least one part of these upper part electrode layer 22, the lower part electrode layer 20, and the piezoelectric layer 21.
| JP2007066729 | ELECTRIC CONTACT SWITCHING DEVICE |
| JPH0749913 | [Name of invention] Piezoelectric oscillator |
| JPS59177980 | MECHANICAL AMPLIFYING MECHANISM |
HIRAOKA SOICHIRO
TAMURA MASAYA
Hiroki Naito
Daisuke Nagano
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