Title:
切換式均一性制御
Document Type and Number:
Japanese Patent JP2004502318
Kind Code:
A
Abstract:
A component delivery mechanism for distributing a component inside a process chamber is disclosed. The component is used to process a work piece within the process chamber. The component delivery mechanism includes a plurality of component outputs for outputting the component to a desired region of the process chamber. The component delivery mechanism further includes a spatial distribution switch coupled to the plurality of component outputs. The spatial distribution switch is arranged for directing the component to at least one of the plurality of component outputs. The component delivery mechanism also includes a single component source coupled to the spatial distribution switch. The single component source is arranged for supplying the component to the spatial distribution switch.
Inventors:
Gotcho Richard A.
Steger Robert Jay.
Steger Robert Jay.
Application Number:
JP2002507401A
Publication Date:
January 22, 2004
Filing Date:
June 08, 2001
Export Citation:
Assignee:
LAM RESEARCH CORPORATION
International Classes:
H05H1/46; B01J4/00; B01J19/08; C23C16/50; C23C16/52; H01J37/32; H01L21/205; H01L21/3065; (IPC1-7): H01L21/3065; B01J4/00; B01J19/08; C23C16/50; C23C16/52; H01L21/205; H05H1/46
Domestic Patent References:
| JPH09291366A | 1997-11-11 | |||
| JPH08288259A | 1996-11-01 | |||
| JPH09237698A | 1997-09-09 |
Attorney, Agent or Firm:
Meisei International Patent Office
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