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Title:
SWITCHGEAR AND TRANSFER CHAMBER
Document Type and Number:
Japanese Patent JP2022143380
Kind Code:
A
Abstract:
To provide a switchgear and transfer chamber, capable of opening and closing an opening part.SOLUTION: A switchgear, opening and closing an opening part for communicating a first chamber with a second chamber adjacent to the first chamber, includes: a planar motor with a coil arranged at the first chamber; a mobile body moving on the planar motor and having a valve disc blocking the opening part ; and a control section controlling energization of the coil.SELECTED DRAWING: Figure 2

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Inventors:
LI DONG WEI
SHINDO TAKEHIRO
Application Number:
JP2021043858A
Publication Date:
October 03, 2022
Filing Date:
March 17, 2021
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677; H02K41/03
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito



 
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