Title:
SWITCHING VALVE
Document Type and Number:
Japanese Patent JP3459699
Kind Code:
B2
Abstract:
PURPOSE: To prevent leakage, etc., of fluid in a switching valve interposed in a stream pipe passage in semi-conductor manufacturing plant, etc.
CONSTITUTION: A switch valve comprises a body 1 in which plural passages 1a, 1b... are formed, plural opening/closing valves V1, V2... provided in the body 1 and opening/closing respective passages 1a, 1b..., a rotary shaft 2 rotatably supported in a body 1 and a coupling mechanism 3 interposed between respective opening/closing valves V1, V2... and the rotary shaft 2 and independently opening/closing respective opening/closing valves V1, V2... by means of the rotation of the rotary shaft 2, and it is preferable to use direct touch type metal diaphragm valves in respective opening/closing valves V1/V2....
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Inventors:
Ryosuke Doi
Susumu Ogawa
Susumu Ogawa
Application Number:
JP5069495A
Publication Date:
October 20, 2003
Filing Date:
March 10, 1995
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
F16K7/16; F16K31/44; F16K31/524; (IPC1-7): F16K31/524; F16K7/16; F16K31/44
Domestic Patent References:
| JP6294472A | ||||
| JP3209084A | ||||
| JP2130473U | ||||
| JP3525764Y1 | ||||
| JP175529Y1 |
Attorney, Agent or Firm:
Takeo Sugimoto