Title:
SYSTEM FOR DELIVERING AND VAPORIZING LIQUID
Document Type and Number:
Japanese Patent JP2693092
Kind Code:
B2
Abstract:
PURPOSE: To minimize parts exposed to liq. and to enable pumping liq. continuously and with a const. volmetric speed by reducing the volume of a path so as to apply positive pressure to the outlet of liquid when applying pressure to a non-compressable liquid and increasing the volume of the path so as to apply negative pressure to the inlet of liquid when reducing the pressure of the liquid.
CONSTITUTION: An inlet 52 and outlet 54 of a pump P are connected with each of connection valves 56, 58 and a pumping room 60 changes its volume when the liq. is charged and sent by the pump P. And the pump P comprises a section 62 separated from the pumping room 60 by an expandable bellows seal 64. A substantially non-compressable liq., e.g. oil, is charged in the section 62. A operation apparatus indicated by a form of a ram axis 66 can be moved to the inside or the outside of the section 62 through a seal 68. When the axis 66 is moved with a uniform speed to the inside or the outside of the section, the turned oil expands or compresses the bellows seal 64 with a constant speed, then the volume of the pumping room 60 is increased or decreased with a constant speed.
Inventors:
James Et. Ewing
Application Number:
JP22980192A
Publication Date:
December 17, 1997
Filing Date:
August 28, 1992
Export Citation:
Assignee:
MKS Instruments, Incorporated
International Classes:
F17C7/04; B01D1/00; B01D3/06; B01J7/00; C23C16/44; C23C16/448; F04B1/00; F04B1/34; F04B15/08; F04B43/08; F04B43/107; F16K41/10; (IPC1-7): B01J7/00; F17C7/04
Domestic Patent References:
| JP6231787A | ||||
| JP2223686A |
Other References:
【文献】米国特許4047850(US,A)
【文献】米国特許3151562(US,A)
【文献】英国特許出願公開1122785(GB,A)
【文献】欧州特許出願公開341031(EP,A)
【文献】仏国特許公開2581442(FR,A)
【文献】米国特許3151562(US,A)
【文献】英国特許出願公開1122785(GB,A)
【文献】欧州特許出願公開341031(EP,A)
【文献】仏国特許公開2581442(FR,A)
Attorney, Agent or Firm:
Masao Okabe (5 others)
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