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Title:
SYSTEM AND METHOD FOR CONTROLLING SMALL-SCALE ENVIRONMENT
Document Type and Number:
Japanese Patent JP2001223263
Kind Code:
A
Abstract:

To provide a system and a method for controlling a small-scale environment with which a sample is placed and preserved in an environment controlled as similar as possible to a process or use conditions for the sample.

This device contains an individual enclosure 1 that houses a sample 3 to separate from the outside. A micro pump array 5 combined with the individual enclosure 1 generates and keeps vacuum controlled in the individual enclosure 1. The sample 3 is put in/out from the individual enclosure 1 by a transportation means 6. A micro pump of the micro pump array 5 can be made a type operating by a heat transition action. A micro temperature sensor 8, a micro pressure sensor 9 and a gas analyzer 10 control operation of the micro pump array 5 through a mounted microcomputer 11.


Inventors:
Chevalier, Eric
Rolland, Bernard
Application Number:
JP2000000374250
Publication Date:
August 17, 2001
Filing Date:
December 08, 2000
Export Citation:
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Assignee:
ALCATEL
International Classes:
B65G49/00; F04B19/00; H01L21/66; H01L21/673; (IPC1-7): H01L21/68; B65G49/00; H01L21/66
Domestic Patent References:
JPH10242233A
JPH0927542A
JPH0681762A
JPH05340356A
JPS59130519A
Attorney, Agent or Firm:
川口 義雄 (外2名)