To provide a differential pressure sensor 12 used for industrial applications.
The differential pressure sensor 12 includes a membrane layer 36, having a covered portion 38 and an exposed portion 40, where a first side of the exposed portion 40 of the membrane layer 36 is in fluid communication to a first aperture and a second side of the exposed portion 40 is in fluid communication with a second aperture. The differential pressure sensor 12 also includes at least one resonating device 42, secured to the covered portion 38 of the membrane layer 36 and configured to oscillate at a desired frequency and a sensing circuitry 22, configured to a detect oscillation at least in one resonating device 42, indicative of the deformation in the membrane layer 36.
| JPH0344079 | COMPOSITE SENSOR |
| JPS6070329 | PRESSURE TRANSMITTING DEVICE |
CHANDRASEKARAN SHANKAR
KISHORE KUNA VENKAT SATYA RAMA
CRADDOCK RUSSELL WILLIAM
| JPS646837A | 1989-01-11 | |||
| JPS58165638A | 1983-09-30 | |||
| JPH10332512A | 1998-12-18 |
Hirokazu Ogura
Toshihisa Kurokawa