Title:
SYSTEM AND METHOD FOR DETERMINING STRAY RADIATION IN HEAT TREATMENT FURNACE
Document Type and Number:
Japanese Patent JP2001194075
Kind Code:
A
Abstract:
To provide a system and method for determining stray light in a heat treatment furnace.
In a system and method for determining the stray radiation (stray light) within a heating chamber 74 of a heat-treatment apparatus 22, the stray radiation is determined by moving an unheated wafer to a plurality of longitudinal positions, and measuring with a detector 36 the amount of radiation reflected from the wafer in each longitudinal direction. The total measured radiation is then correlated with the stray radiation component of the total radiation.
Inventors:
SHAJII AJI
HEBB JEFFREY PAUL
HEBB JEFFREY PAUL
Application Number:
JP2000307572A
Publication Date:
July 17, 2001
Filing Date:
October 06, 2000
Export Citation:
Assignee:
AXCELIS TECH INC
International Classes:
G01N21/27; F27B5/18; F27D21/00; G01J5/00; G01J5/02; G01J5/04; G01J5/10; H01L21/205; H01L21/26; H01L21/66; (IPC1-7): F27D21/00; F27B5/18; G01J5/02; G01J5/10; G01N21/27; H01L21/205; H01L21/26
Domestic Patent References:
| JPH05206042A | 1993-08-13 | |||
| JPH04305130A | 1992-10-28 | |||
| JPH0359440A | 1991-03-14 | |||
| JPH0363534A | 1991-03-19 |
Attorney, Agent or Firm:
Nobuo Kaida (3 outside)