SYSTEM AND METHOD OF FORMING OSCILLATING MAGNETIC FIELD USEFUL FOR IRRADIATING SURFACE WITH ATOM AND MOLECULAR ION IN WORKING GAP

Title:

SYSTEM AND METHOD OF FORMING OSCILLATING MAGNETIC FIELD USEFUL FOR IRRADIATING SURFACE WITH ATOM AND MOLECULAR ION IN WORKING GAP

Document Type and Number:

Japanese Patent JP2005191011

Kind Code:

A

Abstract:

To provide the heavy ion implanting instrument of both a continuous hybrid type and a batch type using a magnetic scan system operated at a frequency from 20Hz to 300Hz condition.

A deflection apparatus for a high perveance ion beam, which works at a basic frequency of 20Hz or an order harmonic wave having a frequency higher than the basic frequency, and which has a magnetic structure formed by a stacked layer (72) having a thickness from 0.2 to 1mm. A compensator comprising a similar stacked layer structure having a resonance excitation circuit, which works at a frequency not less than 20 Hz, and which has a phase closure relation with a preliminary deflected beam frequency. A wide range of application for generating a strong magnetic field in a magnetic space is disclosed with another characteristics.

Inventors:

GLAVISH HILTON F

Application Number:

JP2005006925A

Publication Date:

July 14, 2005

Filing Date:

January 13, 2005

Export Citation:

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Assignee:

NISSIN ELECTRIC CO LTD

International Classes:

G21K1/093; H01F3/02; H01F7/20; C23C14/48; H01J3/32; H01J29/76; H01J37/04; H01J37/09; H01J37/12; H01J37/147; H01J37/317; H01L21/02; H01L21/265; H01L27/12; (IPC1-7): H01J37/317; H01J37/147; H01L21/265

Attorney, Agent or Firm:

Yoshiyuki Inaba
Katsuro Tanaka
Shinji Oga

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