To provide a system and method for compensating non-linearity of the high-velocity type manifested in heterodyne interferometer position data.

The system and method 200 includes receiving a plurality of groups of digital position values 204. A plurality of groups of digital phase values 209M from a measurement channel 208M is received. A first group of the digital position values and digital phase values are digitally processed (210) to generate a plurality of block data values. The plurality of block data values are digitally processed (212) to generate at least one quasi-static non-linearity parameter 214. A second group of the digital position values are compensated (206) based on the at least one quasi-static non-linearity parameter.

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