Title:
SYSTEM AND METHOD FOR MASSFLOW CONTROLLER
Document Type and Number:
Japanese Patent JP2010015580
Kind Code:
A
Abstract:
To provide a method for configuring a massflow controller for operating with fluid and/or operating conditions different from that used during the production of the massflow controller.
A system and method for controlling the mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operating with fluid and/or operating conditions different from that used during the production of the mass flow controller. Further, the system and method include providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
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Inventors:
Lull, John M.
Wang, Chiun
Valentine, William S.
Saggio Jr., Joseph A.
Wang, Chiun
Valentine, William S.
Saggio Jr., Joseph A.
Application Number:
JP2009000184196
Publication Date:
January 21, 2010
Filing Date:
August 07, 2009
Export Citation:
Assignee:
CELERITY INC
International Classes:
G01F1/00; G05D7/06; G01F25/00; G05B5/01; G05B11/36; G05B13/04; G01F1/00; G05D7/06; G01F25/00; G05B5/00; G05B11/36; G05B13/04
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