Title:
ベース励振によるマイクロ－カンチレバー作動のためのシステムおよび方法
Document Type and Number:
Japanese Patent JP7015335
Kind Code:
B2
Abstract:
A system and methods for base excitation of moderately high vibration of micro-cantilevers are disclosed. A micro-cantilever may be coupled to one or more actuators adjacent its base. The actuators may comprise bulk materials, bridges, or formed wires that expand and contract by application of electric currents, due to, for example, the effect of electro-thermal heating or piezoelectric effects. Single actuators or an array of actuators may be placed around the micro-cantilever to oscillate it and apply actuation pulses. The system and methods, and adjustments of the geometrical parameters, may be performed to yield a nominal natural frequency in the system. The excitation of actuators with signals corresponding to the natural frequency may induce resonance in the system and may result in high amplitude vibrations and displacement of the cantilever tip of the micro-cantilever. Various architectures of the actuators may be implemented to stimulate different frequencies of the beam and induce displacement in different direction and amplitudes.
Inventors:
Menon, Carlo
Komeiri, Mohitaba
Komeiri, Mohitaba
Application Number:
JP2020035950A
Publication Date:
February 02, 2022
Filing Date:
March 03, 2020
Export Citation:
Assignee:
INTREPID VISIONS INC.
International Classes:
B81B3/00; B06B1/06; B81B7/02; H01L41/04; H01L41/053; H01L41/09; H01L41/193; H02N2/00; H02N10/00
Domestic Patent References:
| JP2000041385A | ||||
| JP2008504574A | ||||
| JP9096552A | ||||
| JP5173088A | ||||
| JP7266428A | ||||
| JP2010173327A |
Foreign References:
| WO2003045838A1 |
Other References:
橋口 原ほか,マイクロマシーニング技術による熱膨張アクチュエータ一体型ナノグリッパーの開発,電気学会論文誌E,日本,一般社団法人電気学会,2003年04月,Vol. 123, No. 1,1-8ページ
Attorney, Agent or Firm:
Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yumitsu
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yumitsu