Title:
SYSTEM AND METHOD FOR RAPIDLY CHANGING FOCAL LENGTH
Document Type and Number:
Japanese Patent JP2008300358
Kind Code:
A
Abstract:
To provide a system and a method for rapid adjustment of a focal distance of a charged particle beam.
The system and the method for rapidly changing a focal distance of a charged particle beam are provided. The method is provided with a step for changing a control signal in accordance with a relation with the focal distance of the charged particle beam and a control signal voltage value.
Inventors:
SHEMESH DROR
DUBI SHACHAL
DUBI SHACHAL
Application Number:
JP2008181754A
Publication Date:
December 11, 2008
Filing Date:
July 11, 2008
Export Citation:
Assignee:
APPLIED MATERIALS ISRAEL LTD
International Classes:
H01J37/21; A61N5/00; G01N21/00; G21G5/00; H01J3/26; H01J37/08; H01J37/153; H01J37/22; H01J37/26
Domestic Patent References:
| JP2001084938A | 2001-03-30 | |||
| JPH07220668A | 1995-08-18 | |||
| JP2001210263A | 2001-08-03 | |||
| JPH02295042A | 1990-12-05 | |||
| JPH11149895A | 1999-06-02 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Yuichi Yamada