Title:
SYSTEM AND METHOD FOR REMOTELY DIAGNOSING SEMICONDUCTOR PRODUCTION FACILITY
Document Type and Number:
Japanese Patent JP3691371
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a system and a method for remote diagnosis by which both requests of the protection of the secrecy of information in the remote diagnosis of facilities and the prevention of the increase of economical loss are harmonized.
SOLUTION: In the remote diagnosis system for semiconductor production facilities for diagnosing a semiconductor production facilities 10, a user connects the semiconductor production facilities 10 to a diagnosing unit 70 provided by a specified third person through communication networks (30, 40, 50 and 60). The diagnosing unit 70 is provided with at least one diagnosis program (90, 100 or 110) for performing diagnosing processing of the semiconductor production facilities and a control part for starting the diagnosis program corresponding to access from a terminal 20 of the specified user to whom an access right is imparted. The right to utilize the diagnosing unit for pay is imparted to the user, who transmits data requested from the diagnosing unit to the diagnosing unit in the case of diagnosis and receives the diagnosed result from the diagnosing unit.
Inventors:
Nobuo Tsumaki
Takahashi master
Hideyuki Yamamoto
Takahashi master
Hideyuki Yamamoto
Application Number:
JP2000289304A
Publication Date:
September 07, 2005
Filing Date:
September 22, 2000
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G06F13/00; G05B23/02; H01L21/02; (IPC1-7): G05B23/02; H01L21/02
Domestic Patent References:
| JP10021079A | ||||
| JP2000187512A | ||||
| JP2000148435A | ||||
| JP2000259729A | ||||
| JP10340121A |
Attorney, Agent or Firm:
Katsuo Ogawa
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