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Title:
SYSTEM AND METHOD FOR VACUUM PROCESSING
Document Type and Number:
Japanese Patent JP3512404
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a vacuum processing system suppressing increase of the manufacturing cost in corresponding to a large diameter of a specimen without detriment to maintenance capability.
SOLUTION: A vacuum processing system comprises: a cassette stand for placing and holding cassettes containing a specimen; a first specimen-carrying means for carrying the specimen; a loading side loading-lock chamber; a vacuum processing chamber for vacuum processing the specimen under vacuum; a second specimen-carrying means for carrying the specimen under vacuum; and an unloading side loading-lock chamber. The cassette stand is arranged in the atmosphere of a front section of the vacuum processing system, the first specimen-carrying means are arranged in a line between the loading side loading-lock chamber and the unloading side loading-lock chamber, and the specimen is carried one by one at the cassette fed to the cassette stand, the loading side loading-lock chamber, and the unloading side loading-lock chamber.


Inventors:
Soraoka, Minoru
Yoshioka, Takeshi
Kawasaki, Yoshinao
Application Number:
JP2002000204521
Publication Date:
March 29, 2004
Filing Date:
July 19, 1995
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L21/677; B65G49/07; H01L21/68; (IPC1-7): H01L21/68; B65G49/07
Attorney, Agent or Firm:
小川 勝男 (外2名)



 
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