Title:
圧力無反応性自己検証質量流量制御装置を提供するシステムおよび方法
Document Type and Number:
Japanese Patent JP6484248
Kind Code:
B2
Abstract:
A mass flow controller comprises: a pressure-based flow meter, a thermal-based flow meter, a control valve, and a system controller. The pressure-based flow meter and thermal-based flow meter each measure flow rate of mass through the mass flow controller. The control valve controls the flow rate in response to a control signal generated as a function of the flow rate as measured by thermal-based flow meter when the measured flow rate is relatively low, and as a function of the flow rate as measured by the pressure-based flow meter when the flow rate is relatively high. A comparison of the flow measurements of the two flow meters can be used to (a) sense pressure disturbances at low flow rates, and (b) sense when the thermal-based flow meter is out of calibration so that a zero offset signal can be applied to the thermal-based flow meter
Inventors:
Din, Yunha
Rubassi, Michael
Rubassi, Michael
Application Number:
JP2016550840A
Publication Date:
March 13, 2019
Filing Date:
January 26, 2015
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
G01F1/00; G01F25/00; G05D7/06
Domestic Patent References:
| JP2012503833A | ||||
| JP54158524A |
Foreign References:
| US6945123 |
Attorney, Agent or Firm:
Sakai International Patent Office