Title:
フォトマスク注文の生成に使用できる論理オペレーションユーティリティを使用してツーリング仕様を自動的に生成するためのシステム及び方法
Document Type and Number:
Japanese Patent JP2008523498
Kind Code:
A
Abstract:
A method of generating a photomask order used to manufacture photomasks using a tooling specification generating system including generating a tooling specification by creating, modifying and/or deleting components of a logical operation that is represented by the tooling specification. Information required for the logical operation may be imported from an external source, such as a database, and/or may be chosen from look-up lists. Aliases for the operators that make up expressions in the logical operation may be modified as desired by the photomask customer. The format of the tooling specification may be verified by the photomask customer's computer system. The tooling specification is sent to a computer system of a photomask manufacturer in various proprietary and industry standard formats for analysis of the tooling specification, and the photomask design may be simulated using the tooling specification. After receiving the analysis results, the photomask customer's computer system generates the photomask order based on the tooling specification. The photomask order is then sent to the computer system of a photomask manufacturer for manufacture of the photomask. The tooling specification generating system may be a stand-alone system or be integrated with a photomask order generating system.
Inventors:
Cloak, Charles Yee
Written by Christopher Jay
Han, He Cheo
Yu, Chul
Cho, Kyo Young
Ju, Hyun Chin
Written by Christopher Jay
Han, He Cheo
Yu, Chul
Cho, Kyo Young
Ju, Hyun Chin
Application Number:
JP2007545435A
Publication Date:
July 03, 2008
Filing Date:
May 12, 2005
Export Citation:
Assignee:
PHOTRONICS, INC.
International Classes:
G06Q30/00; G03F1/08
Attorney, Agent or Firm:
Michiharu Soga
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Masahiro Taguchi
Hidetoshi Furukawa
Suzuki Kenchi
Kajinami order
Masahiro Taguchi