Title:
エリプソメーター及びポラリメーターにおける電磁放射線のビームの強度を制御するためのシステム及び方法
Document Type and Number:
Japanese Patent JP5054127
Kind Code:
B2
Inventors:
Pfeiffer, Gallen El.
Referred, Martin M.
Referred, Martin M.
Application Number:
JP2009554537A
Publication Date:
October 24, 2012
Filing Date:
March 14, 2008
Export Citation:
Assignee:
J.A.WOOLLAM CO.,INC.
International Classes:
G01J4/04; G01J3/447; G01N21/21; G01N21/27
Domestic Patent References:
| JP56162701A | ||||
| JP63125912A | ||||
| JP2000509830A | ||||
| JP3220516A |
Foreign References:
| US5373359 |
Attorney, Agent or Firm:
Takashi Ogaki
Hiroyuki Okada
Hiroyuki Okada