Title:
熱処理システム中の加工物の移動を制御するためのシステムおよび方法
Document Type and Number:
Japanese Patent JP2004510338
Kind Code:
A
Abstract:
A system and method for processing a workpiece in a thermal processing furnace by measuring the temperature of the workpiece in the thermal processing furnace, and based upon an intended temperature profile and the measured temperature of the workpiece, moving the workpiece through the furnace to heat process the workpiece generally according to the intended temperature profile.
Inventors:
Ant shazy
Brian matthews
Jeffrey Paul Hebb
John Danice
Brian matthews
Jeffrey Paul Hebb
John Danice
Application Number:
JP2002530819A
Publication Date:
April 02, 2004
Filing Date:
August 24, 2001
Export Citation:
Assignee:
Axcelis Technologies, Inc.
International Classes:
C23C16/52; C30B31/18; H01L21/00; H01L21/205; H01L21/26; (IPC1-7): H01L21/26; C23C16/52; H01L21/205
Domestic Patent References:
| JPH07273100A | 1995-10-20 | |||
| JPH07254545A | 1995-10-03 | |||
| JPH07147257A | 1995-06-06 | |||
| JPH0448724A | 1992-02-18 | |||
| JPH02228028A | 1990-09-11 | |||
| JPH1115537A | 1999-01-22 | |||
| JPH02298829A | 1990-12-11 | |||
| JPH10335340A | 1998-12-18 |
Attorney, Agent or Firm:
Calyx
Miyazaki Yoshio
Kaoru Onozuka
Miyazaki Yoshio
Kaoru Onozuka