To provide a small table coater system which realizes the reduction of a cycle time, and also to provide a coating method.
Transfer devices 3 for transferring a substrate between a table coater 4, a preceding process device 2c, and a subsequent process device 5 are arranged in a line on a truck 12 which can slide on a guide rail 11 in the extending direction of the guide rail 11. Each transfer device 3 is provided with a first transfer robot 3a for transferring the substrate between the preceding process device 2c and the table coater 4 and a second transfer robot 3b for transferring the substrate between the table coater 4 and the subsequent process device 5. In the first transfer robot 3a and the second transfer robot 3b, the first transfer robot 3a is switched to a position corresponding to the preceding process device 2c and the table coater 4 and the second transfer robot 3b is simultaneously switched to a position corresponding to the table coater 4 and the subsequent process device 5 by the sliding of the truck 12.
YOSHIMITSU SATOSHI
HIDA MITSUHIRO
Mitsuo Tanaka
Atsushi Maeda