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Patent Searching and Data


Title:
TANK FOR STORING COOLING MEDIUM
Document Type and Number:
Japanese Patent JP2006005061
Kind Code:
A
Abstract:

To provide a driving device which raises the accuracy of a length measuring meter by increasing the quantity of the amount of recovery of heat generated from a driving part, by reducing the increase in a design pressure resistance, by suppressing the increase in the pressure of a cooling medium route due to the increase in the supply quantity of a cooling medium, and by enabling the design pressure resistance due to the decrease in the pressure of a cooling medium route; and which achieved the increased output more than before.

The pressure of the cooling medium supply route entirety becoming a closed circuit which flows from a tank for storing the cooling medium to a heating element, and again returns to the tank for storing the cooling medium by reducing in the pressure in the tank for storing the cooling medium. Accordingly, the design pressure resistance is reduced.


Inventors:
FUJI HIROMITSU
Application Number:
JP2004178197A
Publication Date:
January 05, 2006
Filing Date:
June 16, 2004
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; G03F7/20; H02K9/19; H02K41/03
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio