Title:
TAPE STICKING DEVICE
Document Type and Number:
Japanese Patent JP2022120736
Kind Code:
A
Abstract:
To provide a tape sticking device that sticks a dicing tape to a workpiece and a dicing frame with appropriate tension.SOLUTION: A tape sticking device 1 sticks a dicing tape DT to a workpiece W and a dicing frame DF along the sticking direction D1. The tape sticking device 1 includes a pressing roller 34 that presses the dicing tape DT against the workpiece W and the dicing frame DF, and a support pin 4 that extends the dicing tape DT in the width direction D2.SELECTED DRAWING: Figure 7
Inventors:
KIZAKI SEIKI
Application Number:
JP2021017860A
Publication Date:
August 18, 2022
Filing Date:
February 05, 2021
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
H01L21/301; H01L21/683
Attorney, Agent or Firm:
Takamitsu Shimizu
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