Title:
ターゲットの製造方法および薄膜の製造方法
Document Type and Number:
Japanese Patent JP6707740
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an inexpensive target including a mineral component, a thin film produced with the target as a mineral source, and a manufacturing method of the thin film.SOLUTION: A target is composed of a stone material cut from a natural rock as a raw material, or a volcanic ash sintered body sintered with a volcanic ash fall, and is used for a physical vapor phase deposition method. A large target or a target with a complicated form can be cut or machined from the natural rock, and a target composed of a volcanic ash including more Fe component than shirasu can maintain strength at time of film deposition. A thin film including a mineral component can be obtained inexpensively by sputtering using these targets.SELECTED DRAWING: Figure 1
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Inventors:
Yukio Yoshimura
Kenichi Sodeyama
Kenichi Sodeyama
Application Number:
JP2018066298A
Publication Date:
June 10, 2020
Filing Date:
March 30, 2018
Export Citation:
Assignee:
Kagoshima prefecture
International Classes:
C23C14/34; C04B35/18
Domestic Patent References:
| JP2014043644A | ||||
| JP2013185176A | ||||
| JP2001260270A |
Attorney, Agent or Firm:
Morita Kaikan