PURPOSE: To provide the title target material improved in cooling efficiency and mechanical strength, reduced in resistivity, consisting of R(Y and rare earth element)-A(alkaline earth metal)-(Cu)-O-based ceramic powder and a specified amount of metallic Cu powder.

CONSTITUTION: R-A-Cu-O- or R-A-O-based ceramic powder is blended with 8-40vol.% of metallic Cu powder incorporated, if needed, with ≤20vol.% of CuO. The resultant blend is put to vacuum hot pressing in a vacuum, at 400-900°C under a pressure of 100-200kgf/cm2, thus obtaining the objective target material. This target material has such as a texture that the R-A-(Cu)-O-based ceramic in combination with, if needed, CuO is homogeneously dispersed in the metallic Cu matrix, being improved in cooling efficiency due to said metallic Cu matrix as well as significantly reduced in resistivity, also being increased in mechanical strength, thereby having high toughness.