Title:
TARGET MATERIAL
Document Type and Number:
Japanese Patent JP01270514
Kind Code:
A
Abstract:
PURPOSE: To obtain a target material capable of forming high-temperature superconducting thin film containing Tl, Ba, Ca and Cu of specified composition ratio, free from evaporation of Tl, by blending Tl2O3, CuO or Cu2O, BaCO3 and CaCO3 in specified proportion.
CONSTITUTION: Firstly, a mixed powder is prepared by blending Tl2O3, CuO or Cu2O, BaCO3 and CaCO3 so as to be a composition ratio given by the formula (X is 5-9; Y is 0.3-0.7; Z is 3-7). Thence, this mixed powder is calcined in air at 400-900°C for ca. 4hrs and ground into target powder, which is then formed by pressing, thus obtaining the objective target material for sputtering use for formation of superconducting thin film.
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Inventors:
Ueda, Ichiro
Application Number:
JP1988000097037
Publication Date:
October 27, 1989
Filing Date:
April 20, 1988
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L39/12; C01G1/00; C01G15/00; C04B35/00; C04B35/45; C23C14/34; H01B12/00; H01B12/06; (IPC1-7): C01G15/00; C04B35/00; C23C14/34; H01B12/00; H01B12/06; H01L39/12
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